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ECE 538 Integrated Circuits Technology and Fabrication
贰颁贰听538听听Integrated Circuits Technology and Fabrication听听(3 credit hours)听听
Processes used in fabrication of modern integrated circuits. Process steps for crystal growth, oxidation, diffusion, ion implantation, lithography, chemical vapor deposition, etching, metallization, layout and packaging. Process integration for MOS and biopolar processes. Characterization techniques, simulation, yield and reliability.
Prerequisite: 贰颁贰听404
Typically offered in Fall only
Electrical Engineering (BS): Electronic Devices Concentrations
...304, ECE 403, ECE 442, ECE 418, ECE 489/589, ECE 530, ECE 538, ECE...