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ECE 568 Conventional and Emerging Nanomanufacturing Techniques and Their Applications in Nanosystems

·¡°ä·¡Ìý568/·¡°ä·¡Ìý468/°ä±á·¡Ìý468/°ä±á·¡Ìý568ÌýÌýConventional and Emerging Nanomanufacturing Techniques and Their Applications in NanosystemsÌýÌý(3 credit hours)ÌýÌý

Conventional and emerging nano-manufacturing techniques and their applications in the fabrication of various structures and devices. Review of techniques for patterning, deposition, and etching of thin films including emerging techniques such as an imprint and soft lithography and other unconventional techniques. Electronic and mechanical properties of 0 to 3-D nanostructures and their applications in nano-electronics, MEMS/NEMS devices, sensing, energy harvesting, storage, flexible electronics and nano-medicine. Credit for both ECE/°ä±á·¡Ìý468 and ECE/°ä±á·¡Ìý568 is not allowed.

Prerequisite: ·¡Ìý304

Typically offered in Fall only