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ISE 718 Micro/Nano-Scale Fabrication and Manufacturing
滨厂贰听718听听Micro/Nano-Scale Fabrication and Manufacturing听听(3 credit hours)听听
Introduction to physical theory, process design, analysis, and characterization of micro/nano scale fabrication and manufacturing. The main focus of the course is on the fabrication/manufacturing of important types of microstructures used in micro/nano devices and the techniques and tools used to fabricate and characterize them.
Prerequisite: 滨厂贰听316 or graduate standing in the college of engineering
Typically offered in Spring only