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MSE 460 Microelectronic Materials
惭厂贰听460听听Microelectronic Materials听听(3 credit hours)听听
Processes and characterization techniques relevant to microelectronic materials science and technology. Boule growth, wafer preparation, oxidation, epitaxial growth, doping techniques, metallization, and device applications of elemental and compound semiconductors. Electrical, structural and chemical characterization of semiconductors is included as well as materials considerations relevant to device fabrication. Credit for both 惭厂贰听460 and 惭厂贰听560 is not allowed
Prerequisite: 惭厂贰听355
Typically offered in Fall only