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MSE 560 Microelectronic Materials Science and Technology
惭厂贰听560听听Microelectronic Materials Science and Technology听听(3 credit hours)听听
Processes and characterization techniques relevant to microelectronic materials science and technology. Boule growth, water preparation, oxidation, epitaxial growth, doping techniques, metallization, and device applications of elemental and compound semiconductors. Electrical, structural and chemical characterization of semiconductors as well as materials considerations relevant to device fabrication. Credit for both MAT 460 and 惭厂贰听560 is not allowed
Prerequisite: MAT 331, Corequisite: MAT 431
Typically offered in Fall only