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MSE 760 Materials Science in Processing of Semiconductor Devices
惭厂贰听760听听Materials Science in Processing of Semiconductor Devices听听(3 credit hours)听听
Ion implantation and doping for advanced semiconductor devices, thin films and epitaxy, silicides, ohmic contacts and interconnection metallurgy, oxidation and nitridation, gettering of impurities and dopant segregation phenomena, electromigration, electronic packaging materials science and advanced device concepts.
Prerequisite: MAT 460 and 惭厂贰听500
Typically offered in Fall only
This course is offered alternate years